The Secondary Ion Mass Spectroscopy (SIMS) Laboratory

CEITEC Nano facilities are equipped with a state-of-the-art equipment for multiple analytical tasks which can be used in the material design and science, material process control and failure analysis, etc. We mainly cooperate with the companies from the semiconductor, automotive and glass industry. This page is showing the capabilities of our Secondary Ion Mass Spectrometer (SIMS) and gives you a basic information about possible SIMS analysis we can do for you. Of course, we can also offer complex analysis with different analytical techniques (EDX, XPS, SEM, LEIS, EBIC, AES, AFM) including SIMS like in the following figure. Do not hesitate and contact us for more information.


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