Price List of Expertise - SIMS analysis

Here are some examples of the analysis measured at CEITEC Nano facility:

3D material structural analysis with high mass, spatial and depth resolution. Resolving of Al grains, Si precipitates in grains, grain boundaries, and Si/Al interface. 3D precipitates size evaluation.

Oxygen map obtained by the Nano-SIMS analysis showing a larger amount of oxygen in hexaboron nitride. More info can be found in this article.

Structure analysis of side part of TIGBT transistor

SIMS analysis of the airborne pollution particle on a silicon substrate next to a golden marker. The aim of the analysis was to find out the composition of the circle layer (a residuum of the liquid originally attached to the particle).

Structure analysis of HSQ resist

A typical time range of analysis for one sample is 3-5 hours in total.  The time strongly depends on the sample and type of the analysis:

• 1 hour - Sample and instrument preparation, loading to vacuum
• 1-4 hours - Data acquisition  - depth profiling, 2D, 3D imaging
• 1-3 hours - Processing and data analysis and report preparation

Actual prizes for the SIMS and other instruments in our CEITEC Nano facility can be found here.